This product is a small double-furnaces sliding tube furnace with a quartz tube of Φ50×1400mm and a stainless steel sealing flange. The maximum temperature of the instrument can reach 1200℃. ‘The two furnace bodies can slide on the slide rails to achieve evaporation/sublimation of the raw materials and film deposition. To achieve the fastest heating, the furnace can be preheated to the set temperature and the furnace moved to the sample position. For the fastest cooling, the furnace can be moved to the other end after heating, which is the ideal furnace for low-cost rapid heat treatment.
At the same time, electric slide rails, mass flow meter (MFC) controlled gas supply system and plasma RF power supply can be selected to build the TCVD system.
Application:
The device can be used for graphene preparation, sulfide preparation, and the like.