The essence of this group of CVD systems is a high temperature tube furnace, which is heated by a silicon molybdenum rod, so that the maximum temperature of the instrument can reach 1700℃ The instrument also includes a four-channel mass flow meter and a two-pole rotary vane vacuum pump that form the intake and exhaust portions of the CVD. There is a mechanical vacuum gauge on the right side of the furnace tube to control the vacuum and atmosphere inside the furnace tube. The system adopts PID intelligent temperature control, and the temperature control accuracy can reach ±1℃The tubular furnace is operated with a full-color LCD touch screen. It is simple, intuitive and easy to use. It simplifies the experimental operation and saves test time.