Single heating zone rotary PECVD, equipped with vacuum automatic feeder, and KF40 interface reserved at the end of the furnace tube can be connected to the receiving tank. The feeder adopts screw feeding, the powder can be fed into the furnace tube at a rated rate, and the feeding rate can be changed by adjusting the rotary speed. It can realize the continuous coating and modification of powder materials by PECVD method under the atmosphere protection environment. The receiving tank can collect the processed powder under the atmosphere protection environment.
The equipment is equipped with 100W RF power at 13.56MHz. It can generate plasma in vacuum. High-energy plasma can activate the sample surface, effectively enhance the reaction effect and increase the reaction rate. This auxiliary method is widely used in scientific experiments such as graphene preparation and particle coating.
This equipment is especially suitable for granular sample experiments. Through mechanical transmission, it can control the continuous rotation of the working tube 360° with adjustable rotation speed, so that the materials in the tube are continuously stirred and mixed, and fully contact with the gas and plasma, so that the reaction of the sample is more uniform and stable.