This equipment is multi arc ion coating equipment. Multi arc ion plating uses gas discharge or partial dissociation of evaporated materials to deposit evaporated or reactive materials on the substrate at the same time of bombardment by gas ions or particles of evaporated materials. The equipment is equipped with two multi arc targets, which are arranged on both sides of the cavity. With the planetary sample table, the coating efficiency can be effectively improved and the film forming effect can be improved.
Features
1. The coating instrument also adopts the integrated design, the cavity and the electric control part are left and right separated, realizing the separation of water and electricity, and effectively ensuring the safety of users.
2. The combination of glow discharge, plasma technology and vacuum evaporation can not only improve the film quality, but also expand the application of the film.
3. It has the advantages of fast evaporation rate, strong adhesion, good diffraction and wide film material. It is very suitable for hard protective coating such as TiN. 
4. At the same time, the color of the film can be changed by controlling the atmosphere, and the film is firmly combined with the substrate, so it can also be used to make decorative films of various colors.
Technical parameter:
sample stage:
Planetary sample table, OD 305mm, six stations around
The workpiece can be hung on the support bar of each station
Peripheral speed 1 ~ 20rpm adjustable
Vacuum chamber size:φ300mm *400mm 
Vacuum chamber material:304stainless steel

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