This compact cvd system is composed by a mini tube furnace, a rotary vacuum pump, a 3 gas way float flow controller and a digital vacuum gauge. This compact cvd system is widely used in laboratory thin film preparation, such as MoS2, graphene etc.
Furnace Construction: •High purity ceramic fiber insulation(energy saving 30% and weight lighter about 30% than old furnace). •Double layers steel casing with fan cooling, to ensure the surface of furnace below 50°C. •Perfect sealing stainless steel flange with block.
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