This set CVD equipment is a miniaturized CVD system, the core of which is a mini tube furnace, which uses resistance wire heating, and the maximum temperature of the equipment can reach 1200°C. The instrument also contains a three-channel float flow meter and a molecular pump set, which respectively constitute the inlet and outlet gas parts of the CVD. There is a digital display vacuum gauge on the right side of the furnace tube to control the vacuum degree and atmosphere environment inside the furnace tube. The system adopts PID intelligent temperature control, and the temperature control accuracy can reach ±1℃.
The tube furnace adopts temperature control meter operation in operation, can preset the temperature control curve, one-button start and stop, easy to use, can simplify the experiment operation and save the experiment time. The high-vacuum molecular pump group can effectively increase the background vacuum and improve the quality of the reaction product.