1200℃ single heating zone high vacuum CVD system consists of a single heating zone tube furnace, a three-channel float flow meter and a high vacuum molecular pump set. The tube furnace is controlled by the precision temperature control instrument for PID temperature control. It can edit the 30-segment raising and falling temperature program and has the function of overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.
This system is equipped with a three-channel mass flowmeter, which has high precision and high reliability. It can accurately mix 1~3 channels of gas. The operation panel adopts digital display, which is intuitive and efficient. If you have special needs, you can contact the technician to customize any number of gas channels.
This system is also equipped with a precision molecular pump set, which can achieve a vacuum of 1.0E-3pa level, which can provide users with a purer and more stringent experimental environment than ordinary mechanical pumps.
It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.