1200℃ two heating zone high vacuum CVD system consists of a two-heating zone tube furnace, a three-channel float flow meter and a high vacuum molecular pump set. The two heating zones of the tube furnace are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form two temperature gradients in the heating zone or form a long constant temperature zone. Each zone can be edited with 30 sections program of temperature rise and fall, with overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.
The system is equipped with a three-channel float flowmeter, which can accurately prepare the mixed gas required for the experiment. Another pressure gauge is installed on the front of the float flowmeter to monitor the gas pressure and the mixing tank pressure.
The system is also equipped with a precision molecular pump set, which can achieve a vacuum of 1.0E-3pa level, which can provide users with a purer and more stringent experimental environment than ordinary mechanical pumps.
It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.